Apparatus and vacuum system
Apparatus for connecting a vacuum pump 12, such as a turbo-molecular pump, to a vacuum apparatus. The apparatus comprises a connection element 14 for connection to the vacuum pump, and a fastening element 16 for connection to the vacuum apparatus. A transmission element 18A, 18B transfers a transver...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Apparatus for connecting a vacuum pump 12, such as a turbo-molecular pump, to a vacuum apparatus. The apparatus comprises a connection element 14 for connection to the vacuum pump, and a fastening element 16 for connection to the vacuum apparatus. A transmission element 18A, 18B transfers a transverse insertion motion of the transmission element into an axial motion of the connection element to provide a vacuum-tight connection between the vacuum pump and the vacuum apparatus. The apparatus may include one or more rail 30A, 30B and corresponding guiding element 28A, 28B provided on the connection element and transmission element. The rails and guiding elements may be provided at different heights, and the rails may include angled sections 32A, 32B which may be straight, curved or S-shaped. The fastening element may comprise a recess for accommodation of the transmission element. The apparatus may form part of a vacuum system which further comprises a vacuum pump and vacuum apparatus connected by the apparatus. |
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