Measurement apparatus

A measuring apparatus comprises a detector that detects a surface position of a measuring object. A driver 20 includes a ball nut and supports the detector. A movable support mechanism comprises a rotating shaft 12A which drives, for example, a ball screw 18B. The shaft 12A and ball screw 18A are ro...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Hiroaki Uemura
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A measuring apparatus comprises a detector that detects a surface position of a measuring object. A driver 20 includes a ball nut and supports the detector. A movable support mechanism comprises a rotating shaft 12A which drives, for example, a ball screw 18B. The shaft 12A and ball screw 18A are rotated by a motor 12 so that the driver is moved in a first and second direction. A load device 16 comprises a mechanism for causing energy loss, e.g., a magnetised disc, hysteresis plate, friction pads, and a one-way clutch (40, fig 6). The one-way clutch (40) is configured to transmit rotation of the rotating shaft in the first direction to the mechanism for causing energy loss and configured not to transmit rotation of the rotating shaft in the second direction to the mechanism for causing energy loss.