Super long channel device within VFET architecture

Embodiments are directed to methods and resulting structures for a vertical field effect transistor (VFET) having a super long channel. A pair of semiconductor fins is formed on a substrate. A semiconductor pillar is formed between the semiconductor fins on the substrate. A region that extends under...

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Bibliographische Detailangaben
Hauptverfasser: Fee Li Lie, Marc Bergendahl, Gauri Karve, Sean Teehan, Eric Miller, Kangguo Cheng, John Ryan Sporre
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Embodiments are directed to methods and resulting structures for a vertical field effect transistor (VFET) having a super long channel. A pair of semiconductor fins is formed on a substrate. A semiconductor pillar is formed between the semiconductor fins on the substrate. A region that extends under all of the semiconductor fins and under part of the semiconductor pillar is doped. A conductive gate is formed over a channel region of the semiconductor fins and the semiconductor pillar. A surface of the semiconductor pillar serves as an extended channel region when the gate is active.