Rapid melt growing photodetector
A photo detector (10) including: a waveguide (12) of a waveguide material extending over a substrate (22), an insulating layer (26) formed over the waveguide (12) and having an opening (18) exposing the waveguide (12), a photo detector layer (16) formed over the insulating layer (26) and into the op...
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Zusammenfassung: | A photo detector (10) including: a waveguide (12) of a waveguide material extending over a substrate (22), an insulating layer (26) formed over the waveguide (12) and having an opening (18) exposing the waveguide (12), a photo detector layer (16) formed over the insulating layer (26) and into the opening (18) so as to make contact with the waveguide (12), the photo detector layer 16 having a first end at the opening (18) and a second end distal from the opening (18), the photo detector layer (16) being a gradient material of the waveguide material and germanium wherein a waveguide material portion of the gradient material varies from a maximum at the first end to a minimum at the second end and wherein a germanium portion of the gradient material varies from a minimum at the first end to a maximum at the second end, a photo detector region at the second end, and a photo detector layer extension (30) extending at an angle from the photo detector layer (16) at the second end. |
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