Rapid melt growing photodetector

A photo detector (10) including: a waveguide (12) of a waveguide material extending over a substrate (22), an insulating layer (26) formed over the waveguide (12) and having an opening (18) exposing the waveguide (12), a photo detector layer (16) formed over the insulating layer (26) and into the op...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Jason Scott Orcutt, Edward, William Kiewra, John, Joseph Ellis-Monaghan
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A photo detector (10) including: a waveguide (12) of a waveguide material extending over a substrate (22), an insulating layer (26) formed over the waveguide (12) and having an opening (18) exposing the waveguide (12), a photo detector layer (16) formed over the insulating layer (26) and into the opening (18) so as to make contact with the waveguide (12), the photo detector layer 16 having a first end at the opening (18) and a second end distal from the opening (18), the photo detector layer (16) being a gradient material of the waveguide material and germanium wherein a waveguide material portion of the gradient material varies from a maximum at the first end to a minimum at the second end and wherein a germanium portion of the gradient material varies from a minimum at the first end to a maximum at the second end, a photo detector region at the second end, and a photo detector layer extension (30) extending at an angle from the photo detector layer (16) at the second end.