Apparatus and method for processing, coating or curing a substrate

An apparatus 1000 for coating a substrate comprises a drum 1002 having an electromagnetic charge arranged to transport a moving substrate 1004 and, arranged around the drum, a plurality of alternating precursor inlets 1008 for directing precursor towards the surface of the substrate and plasma proce...

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Bibliographische Detailangaben
Hauptverfasser:	Robert William Jarman, Alexander John Topping, James Tiw Shipman
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	An apparatus 1000 for coating a substrate comprises a drum 1002 having an electromagnetic charge arranged to transport a moving substrate 1004 and, arranged around the drum, a plurality of alternating precursor inlets 1008 for directing precursor towards the surface of the substrate and plasma processing stations for generating a portion of a plasma racetrack 1010 on or adjacent to the surface of the substrate. The precursor may comprise silane. Ceramic based clear barrier coatings may be applied to flexible substrates for packaging of oxygen or moisture sensitive foodstuffs or for the encapsulation of gas or moisture sensitive components in electronics. A method for forming a barrier layer on a moving substrate is also disclosed.