Gas sensor device and method of manufacturing same

A gas sensor device includes a package including a cap in which a through hole for taking gas is formed and a base in which a recessed portion is formed. The cap is attached to the base so that a space is defined around the recessed portion. The device includes metal electrodes fixed to portions sur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shinichi Matsumoto, Muneharu Shimabukuro, Yuki Ura
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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