Gas sensor device and method of manufacturing same

A gas sensor device includes a package including a cap in which a through hole for taking gas is formed and a base in which a recessed portion is formed. The cap is attached to the base so that a space is defined around the recessed portion. The device includes metal electrodes fixed to portions sur...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Shinichi Matsumoto, Muneharu Shimabukuro, Yuki Ura
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A gas sensor device includes a package including a cap in which a through hole for taking gas is formed and a base in which a recessed portion is formed. The cap is attached to the base so that a space is defined around the recessed portion. The device includes metal electrodes fixed to portions surrounding the recessed portion and embedded in the base. The device includes a gas detecting element, which includes a gas detector having a coil-shaped heater that is heated when detecting a predetermined gas, and a plurality of metal lead wires extending from the gas detector to the electrodes. The gas detecting element is held in a suspended state in the recessed portion and/or a space above the recessed portion with the plurality of lead wires, so that the gas detecting element, which includes the heater, does not make contact with walls of the recessed portion.