MEMS device and process

A MEMS transducer comprises a membrane or diaphragm structure having a flexible membrane layer 101 and at least one electrode layer 102a. The electrode layer 102 is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode layer and the m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Colin Robert Jenkins, Clive Robert Graham, Marek Sebastian Piechocinski
Format:	Patent
Sprache:	eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	A MEMS transducer comprises a membrane or diaphragm structure having a flexible membrane layer 101 and at least one electrode layer 102a. The electrode layer 102 is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode layer and the membrane layer. The electrode layer is supported relative to the flexible membrane by means of a support structure 114a which extends between the first electrode layer and the flexible membrane layer. A hole in the electrode layer may extend over the central portion of the flexible membrane or diaphragm. A second electrode 102b is disposed on the opposite side of the flexible membrane layer to the first electrode layer.