MEMS device and process

A MEMS transducer comprises a membrane or diaphragm structure having a flexible membrane layer 101 and at least one lattice-shaped electrode layer 102. The electrode layer 102 is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Colin Robert Jenkins, Clive Robert Graham, Marek Sebastian Piechocinski
Format:	Patent
Sprache:	eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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