MEMS device and process

A MEMS transducer comprises a membrane or diaphragm structure having a flexible membrane layer 101 and at least one lattice-shaped electrode layer 102. The electrode layer 102 is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode l...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Colin Robert Jenkins, Clive Robert Graham, Marek Sebastian Piechocinski
Format:	Patent
Sprache:	eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	A MEMS transducer comprises a membrane or diaphragm structure having a flexible membrane layer 101 and at least one lattice-shaped electrode layer 102. The electrode layer 102 is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode layer and the membrane layer. The electrode layer is supported relative to the flexible membrane by means of a support structure (114,114a, figs 7f & 7g) which extends between the first electrode layer and the flexible membrane layer. A second electrode 102b is disposed on the opposite side of the flexible membrane layer to the first electrode layer. A hole in the electrode layers may extend over the central portion of the flexible membrane or diaphragm (see figs 7f & 7g).