MEMS Sensors with selectively adjusted damping of suspension

A micro-electro-mechanical systems (MEMS) device and method of fabricating the MEMS device are disclosed. The MEMS device comprises a substrate, one or more suspension structures connected to the substrate, one or more metallized layers on the one or more suspension structures, and one or more sense...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mikulas Jandak, Michael Schneider, Ulrich Schmid
Format:	Patent
Sprache:	eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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