Droplet deposition head

A droplet deposition head having a fluid chamber connected to a droplet ejection nozzle and to a reservoir for the fluid, and a piezoelectric actuator element formed at least in part by a fluid chamber wall having an electrode thereon, which element is displaceable in response to a drive voltage to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Peter Mardilovich, John Philip Tatum, Alexandru Cazacu, Song-Won Ko
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A droplet deposition head having a fluid chamber connected to a droplet ejection nozzle and to a reservoir for the fluid, and a piezoelectric actuator element formed at least in part by a fluid chamber wall having an electrode thereon, which element is displaceable in response to a drive voltage to generate a pressure in the chamber to eject a droplet of fluid from the chamber through the nozzle wherein the electrode is provided with a passivation coating which comprises, at least in part, a laminate comprising an inorganic insulating layer nearest to or contacting the electrode and an organic insulating layer overlying the inorganic insulating layer wherein defects in the insulating layers tend to be misaligned at the interface there between and wherein the inorganic insulating layer has thickness less than or equal to 500 nm and the organic insulating layer has a thickness less than 3 μm.