Apparatus and method for tuning pump speed

An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jeffrey Robert Schwab, Gerald Robin Shelley, Mark Kollin Romeo
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.