Surface coatings formed by plasma polymerisation

A plasma chamber 11' for depositing polymer coatings onto a surface of a substrate such as a printed circuit board, the plasma chamber 11' comprising at least first and second electrode sets 14' (14", Fig 4), the first and second electrode sets 14' (14") being arranged...

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Bibliographische Detailangaben
Hauptverfasser:	FILIP LEGEIN, FRANK FERDINANDI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS BASED THEREON DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS PRINTED CIRCUITS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	A plasma chamber 11' for depositing polymer coatings onto a surface of a substrate such as a printed circuit board, the plasma chamber 11' comprising at least first and second electrode sets 14' (14", Fig 4), the first and second electrode sets 14' (14") being arranged either side of a sample chamber for receiving a substrate in a sample tray 15' (15''), wherein the first and second electrode sets 14' (14") comprise electrode layers 141', 142' (141", 142") and wherein each electrode set 14' (14") comprises plural radio-frequency electrode layers or plural ground electrode layers for coating polymer to each surface of the substrate. The radio-frequency electrode layers (20, Fig 2) may comprise a generally planar body formed from folded tubing (21), the tubing typically formed of a conductive metal such as aluminium, stainless steel or copper. The tubing is hollow so as to allow for a temperature regulating fluid to be passed through the electrode.