Linear response MEMS device
A rotatable mirror structure 20 has comb electrodes at either side of the mirror which interdigitate with comb electrodes attached to a fixed supporting substrate. Linear rotation of the mirror is obtained by applying selected potentials to the electrodes. In alternative arrangements the mirror may...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A rotatable mirror structure 20 has comb electrodes at either side of the mirror which interdigitate with comb electrodes attached to a fixed supporting substrate. Linear rotation of the mirror is obtained by applying selected potentials to the electrodes. In alternative arrangements the mirror may be substituted by microlenses, a thin film filter or a diffractive optical element. |
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