Composite wafer carrier
A composite wafer carrier 30 for holding and restraining circular semiconductor wafer disks (W) during their transport, storage, and processing comprises an open top 42 and bottom 44, an upright front end member 32 having an interface portion 34 such as an H-bar, an upright back end member 36, and a...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A composite wafer carrier 30 for holding and restraining circular semiconductor wafer disks (W) during their transport, storage, and processing comprises an open top 42 and bottom 44, an upright front end member 32 having an interface portion 34 such as an H-bar, an upright back end member 36, and a pair of sidewall members 40 with vertical sidewall slots 46, extending rearwardly from the front end member 32 to said back end member 36. At least one of said members is separately molded and joined to the other members of the wafer carrier 30 by cooperating engagement portions without external fasteners. For example, the wafer carrier 30 may be snapped together. A separate second interface (300) at the back end member 36 may be provided to allow the carrier to interface with equipment in an inverted position. The separately formed members permit different materials to be used or the same basic material with different formulations, for example for differing static dissapative characteristics. |
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