Microcooling device for electronic components and method for the production thereof

A microcooling device and a method for its manufacture. The microcooling device has a high heat conductivity, is designed to accommodate electronic components on its exterior surface, and has a channel structure in its interior through which a coolant fluid can flow to carry heat away from the compo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WOLFRAM MUNCH, HANS-JURGEN FUSSER, REINHARD ZACHAI, TIM GUTHEIT
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A microcooling device and a method for its manufacture. The microcooling device has a high heat conductivity, is designed to accommodate electronic components on its exterior surface, and has a channel structure in its interior through which a coolant fluid can flow to carry heat away from the components. The channel structure is formed by a base substrate provided with a plurality of recesses and a cover layer externally covering the recesses, the cover layer being made from an electrically insulating and heat-conducting material, and being such that the electronic components can be mounted directly thereon.