METHOD AND APPARATUS FOR CARBON COATING AND BORON-DOPED CARBON COATING
The disclosed invention employs a gravity assisted open system for coating of refractory substrates with a highly uniform layer of graphite or other material. Pyrolytic dissociation of precursor gases in an inert atmosphere flowing downwardly, countercurrent to the upward direction of transport of t...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The disclosed invention employs a gravity assisted open system for coating of refractory substrates with a highly uniform layer of graphite or other material. Pyrolytic dissociation of precursor gases in an inert atmosphere flowing downwardly, countercurrent to the upward direction of transport of the substrate material, promotes condensation of the coating material on the moving substrate in a homogenous coating. The open configuration of the system allows continuous feed and takeup of substrate material to reduce startup and shutdown transient conditions affecting uniformity of the coating. |
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