DETERMINING THE COMPOSITION OF A SOLID BODY
A method of determining the composition of a solid body comprises guiding a primary ionic beam to impact on the body in a spiral path whereby secondary particles are released from the body which are detected and registered in dependence on the location of their release.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method of determining the composition of a solid body comprises guiding a primary ionic beam to impact on the body in a spiral path whereby secondary particles are released from the body which are detected and registered in dependence on the location of their release. |
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