A MONOLITHIC IMAGE RECEIVER
An image receiver, eg for infra-red radiation, comprises a plate-shaped monocrystalline semiconductor substrate 2 having image sensors 3 surrounded by read-out structures 4 arranged in a mosaic pattern on the one side 0 thereof. On the reverse side R thereof, an arrangement for concentrating the rad...
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Zusammenfassung: | An image receiver, eg for infra-red radiation, comprises a plate-shaped monocrystalline semiconductor substrate 2 having image sensors 3 surrounded by read-out structures 4 arranged in a mosaic pattern on the one side 0 thereof. On the reverse side R thereof, an arrangement for concentrating the radiation which is incident onto this side R, onto the image sensors 3 is formed by etching pits 8 or 8' which are triangular or trapezoidal in cross-section and are formed directly into the substrate by anisotropic etching along crystal planes (1 1 1) inclined to the substrate surface 0. In this way, the "virtual" surface of the image sensors 3 can be increased by twice to three times as much as their actual surface. |
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