ELECTRICALLY MEASURING COATING LAYERS ON TRAVELLING WEBS

Arrangement for electrically measuring coating thickness on travelling webs in vacuum deposition apparatus. A plurality of sensors are arranged with respect to a roller around which the web runs each with a spatially limited measuring region. These produce signals which represent a measure for the c...

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Bibliographische Detailangaben
1. Verfasser:	GERNOT THORN
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	Arrangement for electrically measuring coating thickness on travelling webs in vacuum deposition apparatus. A plurality of sensors are arranged with respect to a roller around which the web runs each with a spatially limited measuring region. These produce signals which represent a measure for the coating thickness. The signals can be indicated by an evaluating circuit. To avoid a falsification of the measuring signals as a result of the tendency of the travelling web to flutter, according to the invention the sensors (3,4,5) are arranged in the roller (1) against its surface and are distributed lengthwise of the roller. The sensors are connected to the evaluating circuit (7) by a transfer device (28). Preferably, the sensors rotate with the roller.