Capacitive differential pressure transducer
A capacitive pressure transducer (20) comprises: a central member (22) having a hole (24) therethrough; a pair of electrically insulative elastic diaphragms (30, 32), deflectable in response to pressure applied thereto, disposed parallel to one another about the hole (24) and bonded to the sides of...
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Sprache: | eng |
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Zusammenfassung: | A capacitive pressure transducer (20) comprises: a central member (22) having a hole (24) therethrough; a pair of electrically insulative elastic diaphragms (30, 32), deflectable in response to pressure applied thereto, disposed parallel to one another about the hole (24) and bonded to the sides of said central member by glass-like seals (34, 36) forming a sealed cavity (40) therebetween; a post (50) slidably received through the hole and attached to the diaphragms for ensuring corresponding displacement of the diaphragms; a first pair (80) of conductive layers applied to each side of the central member (22), and a second pair of conductive members (60a, b) applied respectively to the inside surfaces of the diaphragms thus forming first and a second pressure variable capacitors such that the changes in capacitance of the first and second capacitors are substantially equal and opposite. |
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