PROCEDE DE DETECTION D'UNE ATTEINTE A L'INTEGRITE D'UN SUBSTRAT SEMI-CONDUCTEUR D'UN CIRCUIT INTEGRE DEPUIS SA FACE ARRIERE, ET DISPOSITIF CORRESPONDANT
A semiconductor substrate of an integrated circuit is protected by a coating. The semiconductor includes a front face and a rear face. To detect a breach of the integrity of a semiconductor substrate of an integrated circuit from the rear face, an opening of the coating facing the rear face of the s...
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Zusammenfassung: | A semiconductor substrate of an integrated circuit is protected by a coating. The semiconductor includes a front face and a rear face. To detect a breach of the integrity of a semiconductor substrate of an integrated circuit from the rear face, an opening of the coating facing the rear face of the substrate is detected. In response thereto, an alarm is generated. The detection is performed by making resistance measurements with respect to the semiconductor substrate and comparing the measured resistance to a nominal resistive value of the semiconductor substrate. |
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