PROCEDE ET STATION DE TRAITEMENT D'UNE BOITE DE TRANSPORT EN MATERIAU PLASTIQUE POUR LE CONVOYAGE ET LE STOCKAGE ATMOSPHERIQUE DE SUBSTRATS

PROCEDE ET STATION DE TRAITEMENT D'UNE BOITE DE TRANSPORT EN MATERIAU PLASTIQUE POUR LE CONVOYAGE ET LE STOCKAGE ATMOSPHERIQUE DE SUBSTRATS

A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at l...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: PALISSON JULIEN, LE GUET CATHERINE
Format: Patent
Sprache:fre
Schlagworte:
BASIC ELECTRIC ELEMENTS
BLASTING
CLEANING
CLEANING IN GENERAL
DRYING
DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
WEAPONS
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Beschreibung
Zusammenfassung:A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.