PROCEDE DE COMMANDE D'UN DISPOSITIF PIEZOELECTRIQUE A ELEMENT PIEZOELECTRIQUE RAPPORTE SUR UN SUPPORT
A method for controlling a piezoelectric device including a piezoelectric element attached to a substrate, with the substrate and the piezoelectric element being made of materials having different coefficients of thermal expansion includes the step of subjecting the piezoelectric element to a predet...
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Zusammenfassung: | A method for controlling a piezoelectric device including a piezoelectric element attached to a substrate, with the substrate and the piezoelectric element being made of materials having different coefficients of thermal expansion includes the step of subjecting the piezoelectric element to a predetermined electric voltage in order to cause a predetermined set deformation of the piezoelectric element. The predetermined electric voltage comprises a compensation portion determined according to ambient temperature to cancel a stress generated on the piezoelectric element due to a differential thermal expansion between the piezoelectric element and the substrate. |
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