DISPOSITIF POUR GENERER UN PLASMA PRESENTANT UNE ETENDUE IMPORTANTE LE LONG D'UN AXE PAR RESONNANCE CYCLOTRONIQUE ELECTRONIQUE RCE A PARTIR D'UN MILIEU GAZEUX
The device includes at least two coaxial waveguides each formed of a central conductor and of an external conductor to bring microwaves into a treatment chamber. The at least two electromagnetic wave injection guides are combined with a magnetic circuit elongated in one direction. The magnetic circu...
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Format: | Patent |
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Zusammenfassung: | The device includes at least two coaxial waveguides each formed of a central conductor and of an external conductor to bring microwaves into a treatment chamber. The at least two electromagnetic wave injection guides are combined with a magnetic circuit elongated in one direction. The magnetic circuit surrounding the waveguides by creating a magnetic field capable of achieving an ECR condition close to the waveguides. |
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