CAPTEUR DE GAZ ET SON PROCEDE DE FABRICATION

CAPTEUR DE GAZ ET SON PROCEDE DE FABRICATION

The present invention relates to a gas sensor (10) for detecting substance contained in a fluid stream, wherein the gas sensor comprises a field effect transistor comprising a substrate (12) on which a gate electrode (22) exposed in air, a source electrode (18) and a drain electrode (20) are arrange...

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Hauptverfasser: DAVES WALTER, KRAUSS ANDREAS
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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creator DAVES WALTER
KRAUSS ANDREAS
description The present invention relates to a gas sensor (10) for detecting substance contained in a fluid stream, wherein the gas sensor comprises a field effect transistor comprising a substrate (12) on which a gate electrode (22) exposed in air, a source electrode (18) and a drain electrode (20) are arranged, wherein between the substrate (12) and the gate electrode (22), an electrical insulator (24) is disposed, wherein the electrical insulator (24) is designed as a layer system, and wherein in at least a layer (26, 28, 30) of the layer system defined and stabilized charges are introduced. The gas sensor (10) supplies at high temperatures, a particularly stable measurement behavior by a mechanically and electrically stable electrical insulator (24). The present invention further relates to a method for manufacturing the gas sensor (10).
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title CAPTEUR DE GAZ ET SON PROCEDE DE FABRICATION
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