CAPTEUR DE GAZ ET SON PROCEDE DE FABRICATION

The present invention relates to a gas sensor (10) for detecting substance contained in a fluid stream, wherein the gas sensor comprises a field effect transistor comprising a substrate (12) on which a gate electrode (22) exposed in air, a source electrode (18) and a drain electrode (20) are arrange...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DAVES WALTER, KRAUSS ANDREAS
Format:	Patent
Sprache:	fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	The present invention relates to a gas sensor (10) for detecting substance contained in a fluid stream, wherein the gas sensor comprises a field effect transistor comprising a substrate (12) on which a gate electrode (22) exposed in air, a source electrode (18) and a drain electrode (20) are arranged, wherein between the substrate (12) and the gate electrode (22), an electrical insulator (24) is disposed, wherein the electrical insulator (24) is designed as a layer system, and wherein in at least a layer (26, 28, 30) of the layer system defined and stabilized charges are introduced. The gas sensor (10) supplies at high temperatures, a particularly stable measurement behavior by a mechanically and electrically stable electrical insulator (24). The present invention further relates to a method for manufacturing the gas sensor (10).