Method for manufacturing vibratory actuator for e.g. resistive type touch panel of mobile terminal, involves forming first vibratory actuator element, coupling interface and electrodes, and forming first multilayer structure on substrate
The method involves forming a first vibratory actuator element on a substrate (SB) to vibrate in response to an electrical signal, and forming a first mechanical coupling interface coupled to the element and a control unit (CNTC), where the coupling interface vibrates the control unit as the element...
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