CAPTEUR MICROMECANIQUE POUR MESURER DES VITESSES DE ROTATION ET PROCEDE DE REALISATION D'UN TEL CAPTEUR

The sensor has multiple seismic masses (2a, 2b) connected by a spring element (3). Multiple driving units (1a, 1b) are used for driving the seismic masses in a plane (E). The driving units are connected to one of the seismic masses. Multiple compensation units (5a, 5b) compensate disturbing forces a...

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Bibliographische Detailangaben
Hauptverfasser:	SCHMIDT BENJAMIN, LINDEMANN TIMO, MEISEL DANIEL CHRISTOPH, SCHEBEN ROLF, OHMS TORSTEN
Format:	Patent
Sprache:	fre
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The sensor has multiple seismic masses (2a, 2b) connected by a spring element (3). Multiple driving units (1a, 1b) are used for driving the seismic masses in a plane (E). The driving units are connected to one of the seismic masses. Multiple compensation units (5a, 5b) compensate disturbing forces acting on the driving units perpendicular to the plane. A measuring unit (M) measures rotational speed. The compensating units are arranged perpendicular in a region below or above the driving units being spaced from the plane. The compensating and driving units are provided with electrodes. Independent claims are also included for the following: (1) a method for measuring rotational speed by a micromechanical sensor (2) a method for manufacturing a micromechanical sensor.