Electronic integrated circuit e.g. silicon on insulator type circuit, testing structure, has channel guiding photons to front side of circuit and comprising metallizing rings stack so that vias stop escape of photons from channel
The structure has a channel (80) provided between top of a commutation unit and a front side of an electronic integrated circuit. The channel guides photons towards the front side, where the photons are emitted by the commutation unit. The channel comprises a stack of metallizing rings (82-87) provi...
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Zusammenfassung: | The structure has a channel (80) provided between top of a commutation unit and a front side of an electronic integrated circuit. The channel guides photons towards the front side, where the photons are emitted by the commutation unit. The channel comprises a stack of metallizing rings (82-87) provided in respective bonding layers such that vias acts as a shield to stop escape of the photons from the channel between the rings. An independent claim is also included for an electronic integrated circuit comprising a test structure.
Une structure de test pour circuit électronique intégré ayant un substrat essentiellement plan recouvert d'une pluralité de couches de métallisation (M1-M7), comprend un élément de commutation (10) réalisé à la surface du substrat. Elle comprend en outre un tunnel (80) réalisé dans une (ou des) couche(s) couches de métallisation entre le dessus de l'élément de commutation et la face avant (15) du circuit intégré. Ce tunnel est adapté pour canaliser vers ladite face avant des photons émis par l'élément de commutation. |
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