CAPTEUR MICROMECANIQUE DE HAUTE PRESSION

A process for producing a micromechanical pressure sensor, which is composed of a membrane (1) and a measurement element (4) on top, comprises applying pressure to the membrane. The element has a nickel chromium (silicon) (NiCr(Si)) layer which is at least partially crystallised. Crystallisation tak...

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Bibliographische Detailangaben
Hauptverfasser:	HENN RALF, CUTULI PHILIP, MOELKNER THOMAS, DIDRA HANS PETER, STEINER WERNER, KLOPF FRANK
Format:	Patent
Sprache:	fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A process for producing a micromechanical pressure sensor, which is composed of a membrane (1) and a measurement element (4) on top, comprises applying pressure to the membrane. The element has a nickel chromium (silicon) (NiCr(Si)) layer which is at least partially crystallised. Crystallisation takes place during tempering.