PROCEDE ET DISPOSITIF POUR TESTER DES SUBSTRATS SENSIBLES AUX MOUVEMENTS
The method is implemented by fastening a substrate (14) on the gripping head which is in two parts (9,10) with a spacing, and contacting the substrate by needles (6) of sensors (7) in order to determine the physical properties of the substrate. The substrate (14) is subjected to a mechanical acceler...
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Zusammenfassung: | The method is implemented by fastening a substrate (14) on the gripping head which is in two parts (9,10) with a spacing, and contacting the substrate by needles (6) of sensors (7) in order to determine the physical properties of the substrate. The substrate (14) is subjected to a mechanical acceleration in the process of determining the physical properties. The two parts (9,10) of the gripping head are mobile one with respect to the other, and the acceleration is caused by displacement-generating elements (13) in the spacing, which are of piezoceramic type. The substrate (14) is subjected to an acceleration which is positive, then negative to the stop of motion. The acceleration is linear in a direction parallel to the upper surface of the substrate, or in a direction which is perpendicular to the upper surface of the substrate. The acceleration is angular with respect to an axis of rotation perpendicular to the upper surface. The acceleration is repeatable, and the substrate is subjected to mechanical oscillations. The acceleration is produced by a mechanical nock. In the first embodiment, the acceleration is perpendicular, in the second embodiment the acceleration is perpendicular with a spring constraint, and in the third embodiment the acceleration is angular. In the second embodiment, pins with spring elements are provided in order to avoid jumping of the upper part of the gripping head. The device (claimed) for testing substrates implements the method (claimed). |
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