High voltage CMOS integrated circuit includes substrate and casing of different conductivity, and inter-casing separation regions
The CMOS integrated circuit comprises a semiconductor substrate (1) with a first type of conductivity, and a casing (2) of a second type of retrograde-doped conductivity. Inter-casing insulating regions (4) are provided, separating active elements and reducing parasitic effects between vertical elem...
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Zusammenfassung: | The CMOS integrated circuit comprises a semiconductor substrate (1) with a first type of conductivity, and a casing (2) of a second type of retrograde-doped conductivity. Inter-casing insulating regions (4) are provided, separating active elements and reducing parasitic effects between vertical elements. The CMOS integrated circuit comprises a semiconductor substrate (1) with a first type of conductivity, and a casing (2) of a second type of retrograde-doped conductivity. The end of the casing is covered by an inter-casing insulating region (4). The components contained in the casing are separated from each other by means of intra-casing insulating regions (6,7). The first insulating elements (15) of the second type of high level doping conductivity extend under each intra-casing insulating region. A second region (21) of the second type of high level doping conductivity partially extends under the inter-casing insulator beyond the periphery of each casing.
L'invention concerne un circuit intégré de type CMOS comprenant, dans un substrat semiconducteur (1) d'un premier type de conductivité, un caisson (2) du deuxième type de conductivité a dopage rétrograde, la limite dudit caisson étant recouverte d'une zone isolante inter-caisson (4), les composants contenus dans ledit caisson étant séparés entre eux par des zones isolantes intra-caisson (6, 7), des premières implantations d'isolement (15) à niveau de dopage élevé du deuxième type de conductivité s'étendant sous chaque zone isolante intra-caisson. Une deuxième région (21) à niveau de dopage élevé du deuxième type de conductivité, identique aux premières régions, s'étend partiellement sous l'isolant inter-caisson au-delà de la périphérie de chaque caisson. |
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