PROCEDE DE FABRICATION D'UNE STRUCTURE DE MICROPONT(S) POUR DISPOSITIF MICRO-USINE, ET PRODUITS AINSI OBTENUS

A method of fabricating a microbridge structure for a thermal detector array comprises growing a planarising layer on a substrate, growing a ferroelectric material layer on the planarising layer and then etching the planarising layer away, either wholly or partially, to leave a ferroelectric microbr...

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Bibliographische Detailangaben
Hauptverfasser: NICKLIN RALPH, SCHORROCKS NICOLAS MARTYN, WALKER MARTIN JAMES, PARSONS ANDREW DUNCAN
Format: Patent
Sprache:fre
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Zusammenfassung:A method of fabricating a microbridge structure for a thermal detector array comprises growing a planarising layer on a substrate, growing a ferroelectric material layer on the planarising layer and then etching the planarising layer away, either wholly or partially, to leave a ferroelectric microbridge having a uniform thickness. The planarising layer may be a sacrificial layer or may comprise a sacrificial layer as well as other layers.