PROCEDE DE PURIFICATION DE SILANE
The impurities, especially arsine and phosphine, are removed by sorption, by bringing the silane into contact either with a sorption mass containing copper or with a molecular sieve exchanged with a copper cation.
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Zusammenfassung: | The impurities, especially arsine and phosphine, are removed by sorption, by bringing the silane into contact either with a sorption mass containing copper or with a molecular sieve exchanged with a copper cation. |
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