PROCEDE DE PURIFICATION DE SILANE

The impurities, especially arsine and phosphine, are removed by sorption, by bringing the silane into contact either with a sorption mass containing copper or with a molecular sieve exchanged with a copper cation.

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Bibliographische Detailangaben
Hauptverfasser: BERNARD PACAUD, JEAN-MICHEL POPA, CLAUDE-BERNARD CARTIER
Format: Patent
Sprache:fre
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Beschreibung
Zusammenfassung:The impurities, especially arsine and phosphine, are removed by sorption, by bringing the silane into contact either with a sorption mass containing copper or with a molecular sieve exchanged with a copper cation.