PERFECTIONNEMENTS AUX REACTEURS EPITAXIQUES
Reactor for the deposition of epitaxial coatings from the vapour phase receives the power for the medium frequency induction heating from a generator and transistorised rectifiers. Its transparent quartz bell has several reflectors for the energy reflected by the retainer of the silicon wafers. The...
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| creator | VITTORIO POZZETTI, FRANO PRETI ET PIERGIOVANNI POGGI |
| description | Reactor for the deposition of epitaxial coatings from the vapour phase receives the power for the medium frequency induction heating from a generator and transistorised rectifiers. Its transparent quartz bell has several reflectors for the energy reflected by the retainer of the silicon wafers. The reflectors are made of a material which can reflect the peak emission wavelengths of the retainer and have a min. of coupling with the electromagnetic field of the inductor. |
| format | Patent |
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| subjects | AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL |
| title | PERFECTIONNEMENTS AUX REACTEURS EPITAXIQUES |
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