Method and apparatus for calibrating a spectral imaging device

A method for calibrating a spectral imaging device (500) comprises: - illuminating a calibration sample (CD1) with illuminating light (LB0), - forming first calibration light (LB1CAL1) and second calibration light (LB1CAL2) from the illuminating light (LB0) by using the calibration sample (CD1), - m...

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Bibliographische Detailangaben
1. Verfasser:	MONNOYER, Philippe
Format:	Patent
Sprache:	eng ; fin ; swe
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	A method for calibrating a spectral imaging device (500) comprises: - illuminating a calibration sample (CD1) with illuminating light (LB0), - forming first calibration light (LB1CAL1) and second calibration light (LB1CAL2) from the illuminating light (LB0) by using the calibration sample (CD1), - measuring a first spectrum (MSPEC1) of the first calibration light (LB1CAL1) by using the spectral imaging device (500), - measuring a second spectrum (MSPEC2) of the second calibration light (LB1CAL2) by using the spectral imaging device (500), and- determining or verifying a spectral calibration function lambda(Sd) of the spectral imaging device (500) by comparing the measured spectra (MSPEC1, MSPEC2) with reference spectra (REFSPEC1, REFSPEC2), the spectral calibration function lambda(Sd) specifying a relation, which associates values of a control parameter (Sd) with actual spectral positions (lambda), wherein the calibration sample (CD1) comprises a first calibration region (G1) and a second calibration region (G2), wherein the first calibration region (G1) is arranged to form first calibration light (LB1CAL1) from the illuminating light (LB0) such that the first calibration light (LB1CAL1) has a first spectral peak (CALPEAK1) at a first peak wavelength (lambdaCAL1), wherein the second calibration region (G2) is arranged to form the second calibration light (LB1CAL2) from the illuminating light (LB0) such that the second calibration light (LB1CAL2) has a second spectral peak (CALPEAK2) at a second peak wavelength (lambdaCAL2). Menetelmässä spektrikuvantamislaitteen (500) kalibroimiseksi: - valaistaan kalibrointinäytettä (CD1) valaisuvalolla (LB0), - muodostetaan valaisuvalosta (LB0) kalibrointinäytteen (CD1) avulla ensimmäistä kalibrointivaloa (LB1CAL1) ja toista kalibrointivaloa (LB1CAL2), - mitataan spektrikuvantamislaitteen (500) avulla ensimmäisen kalibrointivalon (LB1CAL1) ensimmäinen spektri (MSPEC1), - mitataan spektrikuvantamislaitteen (500) avulla toisen kalibrointivalon (LB1CAL2) toinen spektri (MSPEC2), ja määritetään tai varmennetaan spektrikuvantamislaitteen (500) spektrikalibrointifunktio (lambda(Sd)) vertaamalla mitattuja spektrejä (MSPEC1, MSPEC2) vertailuspektreihin (REFSPEC1, REFSPEC2), joka spektrikalibrointifunktio (lambda(Sd)) määrittää relaation, joka yhdistää ohjausparametrin (Sd) arvot todellisiin spektrikohtiin (lambda), jossa menetelmässä kalibrointinäyte (CD1) käsittää ensimmäisen kalibrointialueen (G1) ja toisen kalibrointialueen (