Menetelmä ohutkalvojen valmistamiseksi laserablaatiolla käyttämällä moniosaisia laserpulsseja rengasmaisen pyörivän kohtion kanssa

The present invention introduces a method for manufacturing thin films by pulsed laser deposition technology so that the target (15) has essentially an annular cross-section, and laser pulses (12', 12a', 12b') are directed to the inner or outer surface of the target from at least one...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Kekkonen, Ville, Clarke, Fergus, Piirto, Jarkko, Liimatainen, Jari
Format:	Patent
Sprache:	fin ; swe
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	The present invention introduces a method for manufacturing thin films by pulsed laser deposition technology so that the target (15) has essentially an annular cross-section, and laser pulses (12', 12a', 12b') are directed to the inner or outer surface of the target from at least one laser source (11, 11a, 11b). In the invention the target (15) is brought to a rotational movement, and the latest optical element (13, 13a, 13b) directing the pulses to the target can be placed farther away from the target (15), which thus facilitates the protection of the optical elements from contamination.