Majakkatyyppinen skanneri pyörivällä peilillä ja rengasmaisella kohtiolla

The present invention introduces a scanning arrangement and a method suitable for coating processes applying laser ablation. The arrangement is suited to prolonged, industrial processes. The arrangement comprises a target, which has an annular form. The laser beam direction is controlled by a rotati...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CLARKE, Fergus, PIIRTO, Jarkko, KEKKONEN, Ville, LIIMATAINEN, Jari
Format: Patent
Sprache:fin ; swe
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Beschreibung
Zusammenfassung:The present invention introduces a scanning arrangement and a method suitable for coating processes applying laser ablation. The arrangement is suited to prolonged, industrial processes. The arrangement comprises a target, which has an annular form. The laser beam direction is controlled by a rotating mirror locating along the center axis of the annular target. The scanning line will rotate circularly along the inner target surface when the mirror rotates. The focal point of the laser beams may be arranged to locate on the inner target surface to ensure a constant spot size. A ring-formed, a cylinder-shaped or a cut conical-shaped target may be used. The inner surface of the target may thus be tapered in order to control the release direction of the ablated material towards a substrate to be coated.