Menetelmä ja laite vakuumin stabiloimiseksi ja optimoimiseksi vakuumiprosessissa

The invention relates to a method and apparatus for stabilizing vacuum in a vacuum process. According to the invention, the method comprising steps: determining a vacuum level; forming vacuum primarily by means of a barometric leg (1); forming vacuum secondly by means of a vacuum pump device (2); an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Häkkinen, Antti, Ahola, Jero, Karvonen, Vesa
Format:	Patent
Sprache:	fin ; swe
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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