Menetelmä ja laite vakuumin stabiloimiseksi ja optimoimiseksi vakuumiprosessissa

The invention relates to a method and apparatus for stabilizing vacuum in a vacuum process. According to the invention, the method comprising steps: determining a vacuum level; forming vacuum primarily by means of a barometric leg (1); forming vacuum secondly by means of a vacuum pump device (2); an...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Häkkinen, Antti, Ahola, Jero, Karvonen, Vesa
Format: Patent
Sprache:fin ; swe
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to a method and apparatus for stabilizing vacuum in a vacuum process. According to the invention, the method comprising steps: determining a vacuum level; forming vacuum primarily by means of a barometric leg (1); forming vacuum secondly by means of a vacuum pump device (2); and controlling the forming of the vacuum by means of the combination of the barometric leg and vacuum pump device so that the vacuum is adjusted to predetermined level and the vacuum is firstly formed by means of the barometric leg and the vacuum is completed to the predetermined level by means of the vacuum pump device and the vacuum pump device (2) is controlled by means of a frequency converter (4). Further, the invention relates to a use of the method.