SENSOR DE PRESION CAPACITIVO CON CAPACITANCIAS DE REFERENCIA Y METODO DE OBTENCION DEL MISMO

The invention relates to a capacitive pressure sensor (1) with reference capacitors (13, 13'), which comprises a vacuum-sealed hermetic cavity (12) disposed on an insulating layer into which are inserted a first sensor electrode (9) and two reference electrodes (10, 10') that do not increa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BOHORQUEZ REYES, JUAN CARLOS, UNIGARRO CALPA, EDGAR ALBERTO, SEGURA-QUIJANO, FREDY ENRIQUE, ACHURY FLORIAN, ALVARO URIEL, RAMIREZ RODRIGUEZ, FERNANDO, SACRISTAN RIQUELME, JORDI
Format:	Patent
Sprache:	spa
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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