SENSOR DE PRESION CAPACITIVO CON CAPACITANCIAS DE REFERENCIA Y METODO DE OBTENCION DEL MISMO

The invention relates to a capacitive pressure sensor (1) with reference capacitors (13, 13'), which comprises a vacuum-sealed hermetic cavity (12) disposed on an insulating layer into which are inserted a first sensor electrode (9) and two reference electrodes (10, 10') that do not increa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BOHORQUEZ REYES, JUAN CARLOS, UNIGARRO CALPA, EDGAR ALBERTO, SEGURA-QUIJANO, FREDY ENRIQUE, ACHURY FLORIAN, ALVARO URIEL, RAMIREZ RODRIGUEZ, FERNANDO, SACRISTAN RIQUELME, JORDI
Format:	Patent
Sprache:	spa
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a capacitive pressure sensor (1) with reference capacitors (13, 13'), which comprises a vacuum-sealed hermetic cavity (12) disposed on an insulating layer into which are inserted a first sensor electrode (9) and two reference electrodes (10, 10') that do not increase the total area of the sensor. A second sensor electrode (8) integrated into a flexible membrane covers the cavity (12). When an external force deforms the membrane, the capacitor (7) between the electrode sensors (8) and (9) varies, while the capacitors (13, 13') between the electrode (8) and the reference electrodes (10, 10') serve as a reference, so that the deformation of the membrane close to the electrodes (10, 10') is minimal. The sensor also comprises two walls (11) that earth the electrode (8), thereby shielding the sensor against external electromagnetic interference. The method for obtaining the sensor allows the monolithic integration of same into microelectronic circuits.