DISPOSITIVOS MICRO-NANOFLUIDICOS FLEXIBLES

Dispositivos micro-nanofluídicos flexibles. La presente invención se refiere a un procedimiento de fabricación de dispositivos micro-nanofluídicos que incorporan componentes metálicos y micro-mecánicos en voladizo integrados monolíticamente con la circuitería fluídica. A micro-nanofluidic device is...

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Hauptverfasser:	AGUIRREGABIRIA IZAGUIRRE MARIA, SCHULZE JANETTE LILIAN, MAYORA ORIA KEPA, BLANCO BARRO FCO. JAVIER, EZKERRA FERNANDEZ AITOR, RUANO LOPEZ JESUS MIGUEL
Format:	Patent
Sprache:	spa
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY DIAGNOSIS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HUMAN NECESSITIES HYGIENE IDENTIFICATION MEDICAL OR VETERINARY SCIENCE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES SURGERY TRANSPORTING
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Beschreibung
Zusammenfassung:	Dispositivos micro-nanofluídicos flexibles. La presente invención se refiere a un procedimiento de fabricación de dispositivos micro-nanofluídicos que incorporan componentes metálicos y micro-mecánicos en voladizo integrados monolíticamente con la circuitería fluídica. A micro-nanofluidic device is fabricated by depositing photo-curable resin (5) from heat set polymer (3) on 2 substrates (1) (capsule 1 and capsule 2) of polymeric material (2); carrying out photolithography at low temperature to the layers of photo-curable resin; depositing metallic-type components (4) in the capsule; micro-structuring the deposited metallic components; depositing a layer of photo-curable resin from heat set polymer on capsule 1; carrying out photolithography; sealing the obtained capsules; and cutting the device.