DISPOSITIVO DE TRATAMIENTO EN VACIO PARA LA APLICACION DE CAPAS DELGADAS

LA INVENCION TRATA DE UN DISPOSITIVO DE TRATAMIENTO AL VACIO PARA APLICAR CAPAS FINAS SOBRE SUSTRATOS (36 A 38), CON VARIAS CAMARAS DE TRATAMIENTO (DE 8 A 11) FIJAS EN SU SITIO, SUJETAS POR LA PARED LATERAL (3) EN FORMA DE ANILLO O BASTIDOR DE LA CAMARA DE VACIO (2), CON UNAS ABERTURAS DE LA CAMARA...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MAIDHOF, HANS, HEINRICH, JURGEN, SCHUSSLER, HANS, KUNKEL, STEFAN, BEUL, JOHANNES
Format:	Patent
Sprache:	spa
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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