Carbon nitride coating applicable to prevent the multipactor effect

Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place with...

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Hauptverfasser:	RUEDA SANCHEZ FERNANDO, GALAN ESTELLA LUIS, MONTERO HERRERO ISABEL
Format:	Patent
Sprache:	eng ; spa
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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creator	RUEDA SANCHEZ FERNANDO GALAN ESTELLA LUIS MONTERO HERRERO ISABEL
description	Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. (Machine-translation by Google Translate, not legally binding) Recubrimiento de nitruro de carbono aplicable para prevenir el efecto multipactor que consiste en aplicar un recubrimiento de películas de nitruro de carbono durante el funcionamiento de los dispositivos de radio-frecuencia o micro-ondas de alta potencia en el vacío, realizándose la síntesis de alta temperatura de las películas de nitruro de carbono que se realiza en el interior de una cámara de vacío (1) en la cual se instalan un cañón de iones (4) de energía variable para implantar nitrógeno y un sistema de deposición de carbono (3) que actuando simultánea o secuencialmente depositan el recubrimiento antimultipactor sobre la muestra o pieza (7).
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Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. (Machine-translation by Google Translate, not legally binding) Recubrimiento de nitruro de carbono aplicable para prevenir el efecto multipactor que consiste en aplicar un recubrimiento de películas de nitruro de carbono durante el funcionamiento de los dispositivos de radio-frecuencia o micro-ondas de alta potencia en el vacío, realizándose la síntesis de alta temperatura de las películas de nitruro de carbono que se realiza en el interior de una cámara de vacío (1) en la cual se instalan un cañón de iones (4) de energía variable para implantar nitrógeno y un sistema de deposición de carbono (3) que actuando simultánea o secuencialmente depositan el recubrimiento antimultipactor sobre la muestra o pieza (7).</description><edition>7</edition><language>eng ; spa</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2000</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20000116&DB=EPODOC&CC=ES&NR=2138884A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20000116&DB=EPODOC&CC=ES&NR=2138884A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>RUEDA SANCHEZ FERNANDO</creatorcontrib><creatorcontrib>GALAN ESTELLA LUIS</creatorcontrib><creatorcontrib>MONTERO HERRERO ISABEL</creatorcontrib><title>Carbon nitride coating applicable to prevent the multipactor effect</title><description>Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. (Machine-translation by Google Translate, not legally binding) Recubrimiento de nitruro de carbono aplicable para prevenir el efecto multipactor que consiste en aplicar un recubrimiento de películas de nitruro de carbono durante el funcionamiento de los dispositivos de radio-frecuencia o micro-ondas de alta potencia en el vacío, realizándose la síntesis de alta temperatura de las películas de nitruro de carbono que se realiza en el interior de una cámara de vacío (1) en la cual se instalan un cañón de iones (4) de energía variable para implantar nitrógeno y un sistema de deposición de carbono (3) que actuando simultánea o secuencialmente depositan el recubrimiento antimultipactor sobre la muestra o pieza (7).</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2000</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyjEOwjAMBdAsDAi4gy_AUMqQFUVF7LBXbvgBS2lipYbzw8ABmN7y1i4EblMtVMSa3EGxskl5EKtmiTxlkFXShjeKkT1B8yubKEerjZASom3dKnFesPu5cXQebuGyh9YRy_eiwMbheuh67_3x1PV_lA8yrzJb</recordid><startdate>20000116</startdate><enddate>20000116</enddate><creator>RUEDA SANCHEZ FERNANDO</creator><creator>GALAN ESTELLA LUIS</creator><creator>MONTERO HERRERO ISABEL</creator><scope>EVB</scope></search><sort><creationdate>20000116</creationdate><title>Carbon nitride coating applicable to prevent the multipactor effect</title><author>RUEDA SANCHEZ FERNANDO ; GALAN ESTELLA LUIS ; MONTERO HERRERO ISABEL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_ES2138884A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; spa</language><creationdate>2000</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>RUEDA SANCHEZ FERNANDO</creatorcontrib><creatorcontrib>GALAN ESTELLA LUIS</creatorcontrib><creatorcontrib>MONTERO HERRERO ISABEL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>RUEDA SANCHEZ FERNANDO</au><au>GALAN ESTELLA LUIS</au><au>MONTERO HERRERO ISABEL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Carbon nitride coating applicable to prevent the multipactor effect</title><date>2000-01-16</date><risdate>2000</risdate><abstract>Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. (Machine-translation by Google Translate, not legally binding) Recubrimiento de nitruro de carbono aplicable para prevenir el efecto multipactor que consiste en aplicar un recubrimiento de películas de nitruro de carbono durante el funcionamiento de los dispositivos de radio-frecuencia o micro-ondas de alta potencia en el vacío, realizándose la síntesis de alta temperatura de las películas de nitruro de carbono que se realiza en el interior de una cámara de vacío (1) en la cual se instalan un cañón de iones (4) de energía variable para implantar nitrógeno y un sistema de deposición de carbono (3) que actuando simultánea o secuencialmente depositan el recubrimiento antimultipactor sobre la muestra o pieza (7).</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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language	eng ; spa
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subjects	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title	Carbon nitride coating applicable to prevent the multipactor effect
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