Carbon nitride coating applicable to prevent the multipactor effect

Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. Carbon nitride coating applicable to prevent the multipactor effect which comprises applying a coating of carbon nitride films while high power radio frequency or microwave devices are in operation under vacuum, performing high temperature synthesis of the carbon nitride films which takes place within a vacuum chamber 1 in which an ion gun 4 of variable energy is installed in order to implant nitrogen and a system for the deposition of carbon 3 which by acting simultaneously or sequentially deposits the anti-multipactor coating on the sample or workpiece 7. (Machine-translation by Google Translate, not legally binding) Recubrimiento de nitruro de carbono aplicable para prevenir el efecto multipactor que consiste en aplicar un recubrimiento de películas de nitruro de carbono durante el funcionamiento de los dispositivos de radio-frecuencia o micro-ondas de alta potencia en el vacío, realizándose la síntesis de alta temperatura de las películas de nitruro de carbono que se realiza en el interior de una cámara de vacío (1) en la cual se instalan un cañón de iones (4) de energía variable para implantar nitrógeno y un sistema de deposición de carbono (3) que actuando simultánea o secuencialmente depositan el recubrimiento antimultipactor sobre la muestra o pieza (7).