NON-CONTACT OPTICAL METROLOGY SYSTEM TO MEASURE SIMULTANEOUSLY THE RELATIVE PISTON AND THE RELATIVE INCLINATION IN TWO AXES (TIP AND TILT) BETWEEN TWO REFLECTIVE SURFACES

NON-CONTACT OPTICAL METROLOGY SYSTEM TO MEASURE SIMULTANEOUSLY THE RELATIVE PISTON AND THE RELATIVE INCLINATION IN TWO AXES (TIP AND TILT) BETWEEN TWO REFLECTIVE SURFACES

The invention relates to a non-contact optical metrology system to measure simultaneously the relative piston and the relative inclination in two axes (tip and tilt) between two low curvature reflective surfaces using partially coherent light interferometry. The proposed system creates an interferen...

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Bibliographische Detailangaben
Hauptverfasser: LARA SAEZ, Elena, SANQUIRCE GARCIA, Rubén, GONZALEZ JAIO, Maialen, ARASA MARTI, Josep, ROYO ROYO, Santiago, SANTOS VIVES, Pau, ROLDAN NARVION, Manuel Enrique, CASTRO LOPEZ-TARRUELLA, Francisco Javier, RODRIGO ARCAY, Noél, DIAZ CASTILLO, Alexander, PIZARRO BONDIA, Carles, MURGA LLANO, Gaizka
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:The invention relates to a non-contact optical metrology system to measure simultaneously the relative piston and the relative inclination in two axes (tip and tilt) between two low curvature reflective surfaces using partially coherent light interferometry. The proposed system creates an interference pattern with partially coherent light from the linear phase change induced by a double prism system or equivalent, which allows the measurement of the relative piston and the inclination in two axes (tip and tilt) between the reflective surfaces. The relative piston between the mirrors is measured from the position of the interference pattern, the relative inclination in one axis (tip) from the distance between the fringes, and the relative inclination in the other axis from the inclination of the fringes. Relative piston measurements and relative inclination measurements in two axes are decoupled and can be extracted with simple morphological operations, without the need for marginal processing algorithms.