ENVIRONMENT SENSOR AND METHOD FOR OPERATING AN ENVIRONMENT SENSOR

The invention relates to an environment sensor (100), comprising: - a MEMS element (10); - an ASIC element (20) electrically connected to the MEMS element (10) by means of at least two bonding wires (2a, 2b), wherein the ASIC element (20) has an evaluation circuit (40, 50, 60) which is designed to d...

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Hauptverfasser: SLOGSNAT, David, MUSAZZI, Massimiliano, KREUTZER, Joachim, TANGREDI, Domenico, SANTORO, Manuel Salvatore
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creator SLOGSNAT, David
MUSAZZI, Massimiliano
KREUTZER, Joachim
TANGREDI, Domenico
SANTORO, Manuel Salvatore
description The invention relates to an environment sensor (100), comprising: - a MEMS element (10); - an ASIC element (20) electrically connected to the MEMS element (10) by means of at least two bonding wires (2a, 2b), wherein the ASIC element (20) has an evaluation circuit (40, 50, 60) which is designed to determine and evaluate a parasitic capacitance (Cp) between the at least two bonding wires (2a, 2b) connected to pads (3a, 3b) of the MEMS element (10) in order to detect a material deposit on the environment sensor (100).
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language eng ; fre ; ger
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
title ENVIRONMENT SENSOR AND METHOD FOR OPERATING AN ENVIRONMENT SENSOR
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